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World Hydrogen Summit 2026German Exhibitors Singulus Technologies AG

Singulus Technologies AG

Booth number: 4B90a
www.singulus.com/

About us

SINGULUS TECHNOLOGIES develops and assembles innovative machines and systems for efficient thin-film coating and surface treatment processes, which are used worldwide in the Photovoltaics, Semiconductor, Medical Technology, Packaging, Glass & Automotive as well as Battery & Hydrogen markets and new Carbon Capture applications.

The company’s core competencies include various processes of coating technology (PVD sputtering, PECVD, evaporation), surface treatment as well as wet-chemical and thermal production processes. SINGULUS TECHNOLOGIES sees sustainability as an opportunity to position itself with innovative products. In the focus are environmental awareness, efficient use of resources and avoidance of unnecessary CO₂ pollution. SINGULUS TECHNOLOGIES attaches great importance to responsible and sustainable corporate governance.

Inline Sputtering system with horizontal substrate transport

Wet Processing system type SILEX BPP

Inline Sputtering system with vertical substrate transport

Thermal processes, high throughput air and gas flow systems

Treatment systems for carbon capture

Address

Singulus Technologies AG
Hanauer Landstrasse 103
63796 Kahl am Main
Germany

E-mail: sales@singulus.de
Phone:  +49 6188 440-0
Internet: www.singulus.com/
SINGULUS TECHNOLOGIES (SHANGHAI) Co. Ltd.
No. 1400 Jiangchang Road
Room B412-413
200072 Jingan District, Shanghai
China

E-mail: sales@singulus.cn
Phone:  +86 21 61073997
SINGULUS TECHNOLOGIES ASIA PACIFIC PTE LTD.
33 Ubi Avenue 3
#03-54/55, Vertex
408868 Singapore
Singapore

E-mail: sales@singulus.com.sg
Phone:  +65 67 411912
SINGULUS TECHNOLOGIES INC.
429 D Hayden Station Road
CT-06095 Windsor
United States

E-mail: sales@singulus.com
Phone:  +1 860 683 8000

Contact person:

Dirk Beisenherz
Product Manager Sputter System
E-mail: dirk.beisenherz@singulus.de
Phone: +49 6188 4401156

Dr. Maximilian Krause
Product Manager Vacuum Coating Systems
E-mail: maximilian.krause@singulus.de
Phone: +49 6188 4401217

Products & Services

Energy industry
Energy generation
Hydrogen
Technologies

GENERIS PVD

SINGULUS TECHNOLOGIES offers PVD Sputtering Process Systems with horizontal Substrate Transport for Hydrogen Applications

SINGULUS TECHNOLOGIES develops and manufactures advanced vacuum coating systems for the production of bipolar plates used in fuel cells and electrolyzers. Our inline PVD sputtering systems, including the PVD series with horizontal substrate transport, enables the deposition of nanometer-precise high-purity specialized layer systems on metallic and composite substrates. These coatings optimize the electrical and chemical properties of bipolar plates, ensuring high efficiency and long-term stability in hydrogen applications.

Leveraging our expertise in thin-film deposition from the solar industry, SINGULUS TECHNOLOGIES provides cutting-edge solutions for large-scale manufacturing. Our PVD coating technologies enable the production of durable, high-performance bipolar plates, paving the way for efficient and sustainable hydrogen energy systems.

Typical Performance Characteristics

  • Parallel processing of several substrates, different substrate sizes possible

  • Modular configuration, manual or semi-automated lab versions on request

  • Low cost of ownership and high uptime

  • Efficient substrate pretreatment before deposition process

  • Substrate heating before and during the deposition process

  • Dual side sputtering

  • Sputter sequence configurable

  • Rotatable cylindrical magnetrons for highest utilization of target material

  • Dedicated precious metal collection and full recycling supply chain

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GENERIS PVD

VISTARIS PVD

SINGULUS TECHNOLOGIES offers PVD Sputtering Process Systems with vertical Substrate Transport for Hydrogen Applications

SINGULUS TECHNOLOGIES offers the proven sputtering systems VISTARIS PVD with vertical substrate transport. These systems have been developed to enhance the efficiency of thin-film applications, while cutting production costs by using the state-of-the-art technologies. In addition to applications in the solar sector, the VISTARIS PVD sputtering system also offers ideal conditions for other applications such as large glass surfaces. Examples are transparent front or metallic back contact layers as well as multilayered precursors with a broad range of different materials.

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VISTARIS PVD

SILEX BPP Processing System for Chemical Pretreatment in Hydrogen Technology

•       Dedicated chemical pre-treatment sequences for subsequent deposition processes

•       Matched throughput and substrate condition to GENERIS PVD machine platforms and other post processes

•       Compatible for different substrates sizes and materials

•       Intelligent rinse cascading for low OPEX costs

•       High uptime with maintenance friendly access to installation area

•       Advanced process control by onboard data tracking

•       Wide range of optional features like ultrasonic, ozone treatment and furthers

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SILEX BPP

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